LCD Valve
LCD 閥件
1. CF GATE VALVE (G4.5)
VAT 64244-JE52
2. VACUUM VALVE (G4.5)
Model : 80
3. DV Door (G4.5)
...
4. APC VAT 鐘擺閥
(G4.5 G5 G6)
...
5. PC MKS Throttle Valve (G5)
653B-13189, 653B-22815, 653B-29725
6. TCMKS Throttle Valve (G4.5 G5 G6)
153D-13964, 153D-3-80-2, 153D-2-50-2
7. NC Throttle Valve (G8.5)
0191-71249, 000806-1
8. 高真空L型閥門 (G5)
...
9. DDSL Fast Vacuum Valve (G5)
99E1765
10. PC Vacuum Valve (G5)
VULPA-40KF
11. Allen-Bradley Driver (G5)
2098-DSD-020X,2098-DSD-010X,1398-DDM-019X
12. AKT UPS (G5 G6)
MX-1000
13. JEL 真空閥門 (G5 G6)
VAT 12146-PA44-AGW1
14. JEL DDSL Slit Valve (G5)
...
15. Sputter 正壓閥門 (G5)
...
16. Sputter 大氣側 DV (G5)
...
17. JET Slit Valve (G5)
...
18. KT Slit Valve (G5)
...
19. DV Door (G5)
...
20. APC Valve (G5 G6)
VAT 65048-PH52
21. SMC 真空閥 (G5 G6)
XLFR-100D-3L, XLD-100-X855, XLD-100-X663, XLD-80-X644
22. ULVAC 鐘擺閥 (G8.5)
VFR-500
23. AKT 15K , KAX 15K Slit valve (G5)
0022-71231
24. ULVAC APC VALVE (8.5)
VFR-400
25. V-TEX MV 151 (G8.5)
...
26. Inficon Throttle Valve (G8.5)
VBP250-Z
27. Inficon Throttle Valve (G8.5)
VBP160-Z
28. Gate Valve (G8.5)
...
29. 燈箱 (G8.5)
BM400-X
30. MDC 真空閥 (G6)
311082-2002, LAV-800-PAA-02
31. ATS 門閥 (G5)
...
32. Sunrin 門閥 (G5)
SR-NV07-0001
33. MKS 角度閥控制器 (G5)
1651C2S
34. UV 電源模塊 (G8.5)
P5358 13050016